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精品推薦 | SKD2000全自動晶圓探針臺


2023-08-31 14:04

優(yōu)點(diǎn)優(yōu)勢

Advantages

 

高精度高穩(wěn)定性低重心運(yùn)動平臺

 

 

• 采用高強(qiáng)度高剛性鑄件底座,抗振抗沖擊性好,能保證運(yùn)動精度長期穩(wěn)定性。

• 采用進(jìn)口超精密級直線導(dǎo)軌和研磨級滾珠絲杠,保證運(yùn)動的高精度和靜音性。

 

•High-strength and high-rigidity casting base, good vibration and impact resistance, can ensure long-term stability of motion accuracy. 

•Adopt imported ultra-precision class linear guide rail and grinding class ball screw, ensure the movement of high accuracy and silence. 

 

 

• 采用伺服電機(jī)搭配進(jìn)口光柵尺實現(xiàn)全閉環(huán)控制,XY軸最小分辨率0.0001mm ,最大運(yùn)動速度可達(dá)250mm/s,絕對定位精度優(yōu)于±0.002mm。

 

•using servo motor and imported grating ruler to realize full closed-loop control. The minimum resolution of XY axis is 0.0001 mm, the maximum motion speed can reach 250 mm/s, and the absolute positioning accuracy is better than ± 0.002 mm.

 

人性化GUI軟件系統(tǒng)

 

 

• 人性化GUI界面,操作簡便、上手容易,支持中/英文切換,滿足不同用戶語言需求。

• 功能豐富,支持多達(dá)512個BIN數(shù),單次可編輯Multi-site最多為256 Sites。

• 強(qiáng)大的wafer Map編輯功能,支持在線/離線文件輸入輸出,包含csv/txt/TSK二進(jìn)制/jpg四種輸出格式,支持GPIB、USB、COM、TTL、LAN多種通訊方式。

 

• User-friendly GUI interface, easy to operate, easy to use, support Chinese/English switching, to meet the needs of different user languages.

• Feature-rich, with support for up to 512 BIN counts, and a single editable Multi-site of up to 256 Sites.

• Powerful Wafer Map edit function, support online/offline file input/output, including CSV/TXT/TSK binary/jpg four output formats, support GPIB, USB, COM, TTL, LAN multiple communication methods.

 

 

高兼容性

 

 

• 根據(jù)客戶樣品可靈活配置接觸式/非接觸式/下托/上吸/陶瓷/碳纖維等多種叉臂,能滿足超薄/翹曲/Taiko/藍(lán)膜等多種晶圓的測試需求。

• 利用Probe腔體進(jìn)行風(fēng)道量化模擬和隔熱絕緣安全保護(hù),能勝任高溫、低溫、高壓等多種測試應(yīng)用場合。

• 自研獨(dú)立式可拆卸Hinge裝置,可靈活搭配行業(yè)內(nèi)常見的各種測試機(jī)。

 

• According to customer samples, we can flexibly configure many kinds of arms, such as contact / non-contact / underrest / up-suction / ceramic / carbon fiber, which can meet the test requirements of ultra-thin/warped/Taiko/blue film and so on.

• Using Probe cavity to carry out air duct quantitative simulation and thermal insulation safety protection, can be competent for high temperature, low temperature, high pressure and other testing applications.

• self-developed independent detachable Hinge device, which can be flexibly combined with various testing machines commonly found in the industry.

 

規(guī)格參數(shù)

Specification parameters

 

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